发明名称 太陽電池用透明導電膜およびその製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a transparent conductive film having low resistance, high transmittance and adequate surface unevenness, and a method for manufacturing the same. <P>SOLUTION: The transparent conductive film includes a first layer of fine crystal grain formed on a substrate, and a second layer of large crystal grain formed on the first layer. In the transparent conductive film, the width of the fine crystal grain in the surface direction of the substrate is≤50 nm, the thickness of the first layer is≤200 nm, and the thickness of the second layer is≥300 nm. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5729595(B2) 申请公布日期 2015.06.03
申请号 JP20110054071 申请日期 2011.03.11
申请人 发明人
分类号 C23C14/34;C23C14/08;H01B5/14;H01B13/00 主分类号 C23C14/34
代理机构 代理人
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