INLINE DEPOSITION APPARATUS FOR MANUFACTURING OLED

摘要

Disclosed is an inline deposition apparatus for manufacturing an OLED. The inline deposition apparatus for manufacturing the OLED according to one embodiment of the present invention includes a plurality of partitions which are arranged by interposing a separation space on the upper region of the inner side of a chamber to perform the deposition process of a substrate, an evaporation source which is arranged on the lower region of the inner side of the chamber and supplies an evaporation material to the separation space, and a plurality of vertical rotation shutter units which are combined with the partitions and selectively open and close the separation space by rotating in the intersection direction of the planar surface of the substrate.