| 摘要 |
<p>A miniature mass spectrometer is disclosed comprising: an atmospheric pressure ionisation source; a first RF ion guide located in a first vacuum chamber, said chamber also having an atmospheric pressure sampling orifice or capillary; and a series of at least two further differentially pumped vacuum chambers located downstream of the first; wherein the spectrometer further comprises a tandem quadrupole mass analyser, a 3D ion trap mass analyser, a linear ion trap mass analyser, a TOF mass analyser, a quadrupole-TOF mass analyser or an electrostatic mass analyser arranged in at least one of said downstream chambers. A split flow turbomolecular vacuum pump comprising at least one intermediate/interstage port, and a high vacuum (HV) port, is connected to the at least two further vacuum chambers. A first vacuum pump with a maximum pumping speed of ≤ 10 m3/hr (2.78 L/s) is arranged to pump the first vacuum chamber to a pressure of <10 mbar and to act as a backing vacuum pump to the split flow turbomolecular vacuum pump.</p> |
