发明名称 Semiconductor device
摘要 A field plate electrode is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of a first circuit region. A coupling transistor couples a first circuit to a second circuit lower in supply voltage than the first circuit. A second conductivity type region is disposed around the coupling transistor. A part of the field plate electrode partially overlaps with the second conductivity type region. The field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region. A ground potential or a power potential of the second circuit is applied to the field plate electrode at a portion located on the second conductivity type region side from the center.
申请公布号 US9048213(B2) 申请公布日期 2015.06.02
申请号 US201414325003 申请日期 2014.07.07
申请人 RENESAS ELECTRONICS CORPORATION 发明人 Kanda Ryo;Toda Tetsu;Nakahara Yasushi;Kaya Yoshinori
分类号 H01L29/78;H01L29/40;H01L29/10;H01L29/06;H01L27/02 主分类号 H01L29/78
代理机构 McDermott Will & Emery LLP 代理人 McDermott Will & Emery LLP
主权项 1. A semiconductor device, comprising: a substrate; a first circuit region that is formed on the substrate in which a first circuit whose power potential is a first voltage is formed; a separation region that surrounds the first circuit region; a second circuit region that is formed on the substrate, and located outside of the separation region in a plan view, in which a second circuit whose power potential is a second voltage lower than the first voltage; and a coupling transistor that is located in the separation region, couples the second circuit to the first circuit, and has a source and a drain of a first conductivity type, wherein the separation region includes: an element separation film formed on the substrate; a field plate electrode that overlaps with the element separation film in a plan view, and is repetitively disposed in a folded manner or a spiral shape in a direction along an edge of the first circuit region; a second conductivity type region that is disposed on the substrate, overlaps with the element separation film in a plan view, and is located around the coupling transistor; and a first conductivity region that is located on a side opposite to the source or the drain of the coupling transistor through the second conductivity type region, wherein a part of the field plate electrode overlaps with a part of the second conductivity type region, and wherein the field plate electrode is electrically coupled to a drain electrode of the coupling transistor at a portion located on the first circuit region side from a center thereof in a width direction of the separation region, and coupled to a ground potential or the second circuit at a portion located on the second circuit region side from the center.
地址 Kanagawa JP