Micromechanical element which can be deflected

摘要

The invention relates to deflectable micromechanical elements which can preferably be deflected in translation and optionally also in an oscillatory manner. With respect to known solutions, it is the object of the invention to enable larger deflections with a simultaneously improved resistance toward lateral forces and torques. In this connection, a suspension having at least one spring system is present at elements in accordance with the invention. Levers pivotally connected to torsion spring elements are present at spring systems. Torsion spring elements of a spring system are aligned in a common axis and/or a plurality of axes arranged parallel to one another and at least one torsion spring element is fixedly clamped.

主权项

1. A deflectable micromechanical element, comprising:
a substrate defining a plane, where a first axis extends parallel to the substrate and a second axis extends parallel to the substrate and orthogonal to the first axis; and a suspension supporting the substrate and including at least first and second spring systems, wherein: each of the first and second spring systems is formed with levers which are pivotally connected to torsion spring elements, such that the substrate is permitted to exhibit oscillating translation deflection movement in a direction perpendicular to the plane of the substrate, and the levers have a larger mechanical resistance torque than the torsion spring elements in the perpendicular direction of the substrate, at least one of the levers of each of the first and second spring systems extends parallel to the first axis and directly engages a respective peripheral edge of the substrate, at least one of the torsion spring elements of each of the first and second spring systems is fixedly clamped at one end thereof, the torsion spring elements of each of the first and second spring systems are aligned parallel to the second axis and orthogonal to the first axis, the respective levers and torsion spring elements of each of the first and second spring systems are arranged symmetrically about the first axis, such that the first axis is an axis of symmetry of the micromechanical element.