Sensing device and related operating methods

摘要

Apparatus, systems, and methods are provided for sensing devices. An exemplary sensing device includes a sensing arrangement on a substrate to sense a first property, a heating arrangement, and a control system coupled to the first sensing arrangement and the heating arrangement to activate the heating arrangement to heat the first sensing arrangement and deactivate the heating arrangement while obtaining one or more measurement values for the first property from the first sensing arrangement.

主权项

1. A sensing device comprising:
a first sensing arrangement on a substrate semiconductor die to sense a first property; a heating arrangement to heat the first semiconductor die when activated; a temperature sensing arrangement; a control system coupled to the first sensing arrangement, the heating arrangement and the temperature sensing arrangement, the control system to activate the heating arrangement and automatically deactivate the heating arrangement in sync with obtaining a plurality of measurement values for the first property from the first sensing arrangement and a plurality of measured temperature values corresponding to a temperature of the first sensing arrangement from the temperature sensing arrangement concurrently to obtaining the plurality of measurement values for the first property.