发明名称 |
Microfluidics delivery systems |
摘要 |
Methods of dispensing a small amount of liquid onto a work piece includes in some embodiments known providing a microscopic channel for the liquid to flow from the nanodispenser. In some embodiments, dispensing the liquid includes dispensing the liquid using a nanodispenser have at least one slit extending to the tip. Some methods include controlling the rate of evaporation or the rate of liquid flow to establish an equilibrium producing a bubble of a desired size. |
申请公布号 |
US9044781(B2) |
申请公布日期 |
2015.06.02 |
申请号 |
US201213693938 |
申请日期 |
2012.12.04 |
申请人 |
FEI COMPANY |
发明人 |
Botman Aurélien Philippe Jean Maclou;Randolph Steven;Utlaut Mark W. |
分类号 |
B05D1/26;C25D5/02;C25F3/14;G01N23/225 |
主分类号 |
B05D1/26 |
代理机构 |
Scheinberg & Associates, PC. |
代理人 |
Scheinberg & Associates, PC. ;Scheinberg Michael O. |
主权项 |
1. A method of dispensing liquid with a nanodispenser onto a work piece in a vacuum chamber, comprising:
providing a nanocapillary having a diameter at the tip of less than 50˜m and having at least one slit cut into the nanocapillary, the slit(s) extending to the tip; and contacting the tip of the nanocapillary to the work piece surface to dispense liquid from the nanocapillary onto the work piece. |
地址 |
Hillsboro OR US |