发明名称 Microfluidics delivery systems
摘要 Methods of dispensing a small amount of liquid onto a work piece includes in some embodiments known providing a microscopic channel for the liquid to flow from the nanodispenser. In some embodiments, dispensing the liquid includes dispensing the liquid using a nanodispenser have at least one slit extending to the tip. Some methods include controlling the rate of evaporation or the rate of liquid flow to establish an equilibrium producing a bubble of a desired size.
申请公布号 US9044781(B2) 申请公布日期 2015.06.02
申请号 US201213693938 申请日期 2012.12.04
申请人 FEI COMPANY 发明人 Botman Aurélien Philippe Jean Maclou;Randolph Steven;Utlaut Mark W.
分类号 B05D1/26;C25D5/02;C25F3/14;G01N23/225 主分类号 B05D1/26
代理机构 Scheinberg & Associates, PC. 代理人 Scheinberg & Associates, PC. ;Scheinberg Michael O.
主权项 1. A method of dispensing liquid with a nanodispenser onto a work piece in a vacuum chamber, comprising: providing a nanocapillary having a diameter at the tip of less than 50˜m and having at least one slit cut into the nanocapillary, the slit(s) extending to the tip; and contacting the tip of the nanocapillary to the work piece surface to dispense liquid from the nanocapillary onto the work piece.
地址 Hillsboro OR US