| 发明名称 | Method of manufacturing switchable filters | ||
| 摘要 | Switchable and/or tunable filters and methods of manufacture. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes. | ||
| 申请公布号 | US9048809(B2) | 申请公布日期 | 2015.06.02 |
| 申请号 | US201213342375 | 申请日期 | 2012.01.03 |
| 申请人 | INTERNATIONAL BUSINESS MACHINES CORPORATION | 发明人 | Adkisson James W.;Candra Panglijen;Dunbar Thomas J.;Gambino Jeffrey P.;Jaffe Mark D.;Stamper Anthony K.;Wolf Randy L. |
| 分类号 | H03H3/08;H03H9/05;H03H9/10;H01L41/09;H03H9/64 | 主分类号 | H03H3/08 |
| 代理机构 | Roberts Mlotkowski Safran & Cole, P.C. | 代理人 | Canale Anthony;Roberts Mlotkowski Safran & Cole, P.C. |
| 主权项 | 1. A method comprising: forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate; forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes; forming a bottom actuator on the piezoelectric substrate, below the MEMS beam; and forming a top actuator on an insulator layer, above the MEMS beam. | ||
| 地址 | Armonk NY US | ||