X-ray measurement apparatus

摘要

A portable, for example, a hand-held-type, X-ray measurement apparatus, wherein the vibration or hand-shaking of the X-ray measurement apparatus is detected by a vibration-detection sensor such as a distance sensor, a gyro sensor, or the like, and a measurement value for the X-ray intensity obtained using a two-dimensional X-ray detector is corrected on the basis of a variation quantity obtained using the vibration-detection sensor. The correction may be a correction related to an X-ray source, a correction related to an X-ray detector, a correction calculated using the CPU of a computer and a software program, or the like.

主权项

1. An X-ray measurement apparatus having:
an X-ray source for generating an X-ray incident on a measurement object; X-ray detection means for detecting an X-ray leaving the measurement object; and a housing containing the X-ray source and the X-ray detection means; the X-ray measurement apparatus comprising: a vibration quantity detection sensor for detecting a vibration quantity of the housing; and a controller for controlling the X-ray source, the X-ray detection means and the vibration quantity detection sensor, wherein the controller:
obtains X-ray intensity at each sampling time by using the X-ray detection means;integrates the obtained X-ray intensity;detects the vibration quantity at each sampling time by using the vibration quantity detection sensor;determines a variation quantity of a position of the housing in relation to the measurement object based on the vibration quantity;determines measurement condition values based on the variation quantity for compensation for the variation quantity; andwhen any one of the measurement condition values has a variation large enough so that compensation is not possible, the corresponding X-ray intensity is not included in the integration.