Method of obtaining patters in an antireflective layer

摘要

The invention relates to the field of production in thin coatings of electronic devices and/or MEMS and relates to an improved method for forming a pattern in a thin SiARC anti-reflective coating, comprising the doping by deposition of such SiARC coating covered with a resist pattern through a protective coating of the resist pattern, then etching the doped zones of the SiARC coating (FIG. 3c).

主权项

1. A method for forming a pattern in a first coating comprising:
forming, on a first coating, covered with at least a photoresist-based masking block resting on said first coating, a protective coating covering the first coating and said masking block, plasma deposition of zones of the first coating located on the periphery of said masking block, using at least one dopant species, with the dopant species being selected so that the doped zones are liable to be selectively etched relative to the rest of the first coating and relative to the masking block, with the deposition energy, the deposition duration and the deposition dose thereof, as well as the thickness of the protective coating being provided so that said doped zones located on the periphery of said masking block and a region without deposition of the first coating located under the masking block have a boundary directly above or extending from the side face(s) of said masking block, and selective etching of the doped zones of the first coating relative to the not doped zones of the first coating and to the masking block.