| 摘要 |
Adevice for surface treatment of the internal surfaces of rotary bodies is described wherein the process is carried out in such away that the internal surface of the rotary body is treated by sputtered ions of material, wherein the ions are sputtered from a rod made of appropriate material for example of TiN, WC, CrN, CrC and next nitrides and/or carbides and/or borides of transition metals. The rod is placed into interior space of the rotary body in such a way that the geometrical axis of the rod is identical with the geometrical axis of the internal cylindrical surface of the rotary body. The device consists of a vacuum chamber wherein is placed the rotary body. Negative potential from range up to 10 kV from electric supply and ion source are connected to the rotary body. Positive potential from range up to 10 kV from electric supply is connected to the rod made of material intended for layer deposition onto the internal surface of the rotary body. |
