Vented combinatorial processing cell

摘要

A vented combinatorial processing cell is described, including a sleeve having an end forming a fluid seal with a region of a substrate, a flow head including a vent and disposed in the sleeve to dispense fluid onto the region, the flow head, the substrate, and the sleeve defining a chamber for processing the region, a fluid source attached to the flow head to deliver the fluid into the chamber, and a vacuum port attached to the flow head to remove fluid from the chamber.

主权项

1. A combinatorial processing apparatus comprising:
a cell having a fluid seal for defining at least one region on a substrate; a flow head comprising at least one vent and disposed in the cell to dispense fluid into the at least one region, wherein the flow head, the substrate, and the cell define a process chamber above the at least one region and the flow head is configured to move within the cell towards the substrate; a protrusion extending from the flow head into the process chamber, wherein the protrusion is shaped to form a vacuum plenum around a periphery of the protrusion, wherein when the flow head is moved towards the substrate, the fluid is squeezed into the vacuum plenum; a fluid source attached to the flow head to deliver the fluid into the chamber; and a vacuum port extending through the flow head and in fluid communication with the vacuum plenum to remove the fluid from the chamber.