Resist composition for negative tone development and pattern forming method using the same

摘要

For stably forming a high-precision fine pattern and thereby producing a highly integrated electronic device with high precision, a resist composition for negative tone development, which can reduce the line edge roughness and enhance the in-plane uniformity of the pattern dimension and furthermore, can ensure excellent bridge margin, and a pattern forming method using the same are provided.;A resist composition for negative tone development, comprising (A) a resin capable of increasing the polarity by the action of an acid to increase the solubility in a positive tone developer and decrease the solubility in a negative tone developer, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and (C) a solvent, wherein the log P value of the acid generated from the (B) compound capable of generating an acid upon irradiation with an actinic ray or radiation is from 1.5 to 12.0; and a pattern forming method using the same.

主权项

1. A pattern forming method, comprising:
(i) a step of applying a resist composition for negative tone development, comprising (A) a resin capable of increasing a polarity of the resin (A) by an action of an acid to increase a solubility of the resin (A) in a positive tone developer and decrease a solubility of the resin (A) in a negative tone developer, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and (C) a solvent, in which a logP value of the acid generated from (B) the compound capable of generating an acid upon irradiation with an actinic ray or radiation is from 1.5 to 12.0; (ii) an exposure step; and (iv) a step of performing development by using a negative tone developer, wherein the negative tone developer contains an organic solvent and the organic solvent contained in the negative tone developer is ester-based solvent, wherein (B) the compound capable of generating an acid upon irradiation with an actinic ray or radiation is a compound containing in an anion structure thereof a group having a non-fluorine-substituted hydrocarbon skeleton having a carbon number of 2 or more.