图案形成方法及用于其的表面处理剂、以及电子元件的制造方法及电子元件;PATTERN FORMING METHOD AND SURFACE TREATMENT AGENT USED IN THE SAME, AND METHOD FOR PRODUCING ELECTRONIC DEVICE AND ELECTRONIC DEVICE

摘要

一种图案形成方法，其依序包括以下步骤：(1)藉由第一感光化射线性或感放射线性树脂组成物来形成第一感光化射线性或感放射线性膜，第一感光化射线性或感放射线性树脂组成物含有因酸的作用而分解并产生极性基的树脂；(2)对第一感光化射线性或感放射线性膜进行曝光；(3)使用包含有机溶剂的显影液对第一感光化射线性或感放射线性膜进行显影，而获得第一显影图案；(4)使含有与曝光后的树脂所具有的极性基进行相互作用的化合物的表面处理剂对第一显影图案发挥作用；以及(5)使用硷性显影液进一步对第一显影图案进行显影，而获得第二显影图案。; (2) exposing the first actinic ray-sensitive or radioactive ray-sensitive film; (3) obtaining a first developing pattern by using a developing solution including an organic solvent to develop the first actinic ray-sensitive or radioactive ray-sensitive film; (4) reacting the first developing pattern with a surface treatment agent containing a compound which interacts with the polar group contained in an exposed resin; and (5) obtaining a second developing pattern by using an alkali developing solution to further develop the first developing pattern.