微型气体侦测装置;micro gas sensing device

摘要

本发明为一种微型气体侦测装置，其包含一加热线圈、一立体侦测元件与一温度侦测元件，立体侦测元件上设有侦测件，侦测件上设有氧化层，加热线圈具有一中空空间，供立体侦测元件与温度侦测元件穿设于其中，加热线圈对立体侦测元件之周围加热至一工作温度，以促使侦测件上的氧化层与气体加速氧化/还原反应，同时藉由侦测件增加气体接触面积，并利用温度侦测元件监测工作温度，以确保立体侦测元件之周围温度维持于工作温度，进而改善气体侦测效率。;A micro gas sensing device according to the present invention is provided. The device comprises a heat coil, a solid sensing member and a temperature sensing member. A sensing element is set on the solid sensing member, and a oxide layer is set on the sensing element. The heat coil has a hollow space which provides the solid sensing member and the temperature sensing member passing through therein. The heat coil heats the surrounding temperature of the solid sensing member to a working temperature for facilitating the oxidation-reduction reaction on the oxide layer of the sensing element. Further, the gas contacting area of the sensing element is increased and the working temperature is monitored by using the temperature sensing member to maintain the working temperature at the surrounding of the solid sensing member for improving the sensitivity of gas.