涂布装置及方法、显示装置用部件的制造装置及制造方法;COATING APPARATUS AND METHOD THEREOF, APPARATUS AND METHOD THEREOF FOR MANUFACTURING MEMBER OF DISPLAY DEVICE

摘要

本发明提供一种涂布装置、涂布方法、显示装置用部件的制造装置及显示装置用部件的制造方法，本发明可使用多个感测器效率佳且准确地检测黏合剂的涂布厚度。所述涂布装置包括：检测部30A，配置在涂布喷嘴21相对移动的方向上的涂布喷嘴21的下游侧，检测至设置在载台11上的校正部11a的距离及至工件S表面的距离；检测部30B，配置在涂布喷嘴21的上游侧，检测至校正部11a的距离及至涂布在工件S上的黏合剂表面的距离；及控制装置P，对检测部30A、30B的检测值进行校正而算出黏合剂R的涂布厚度。; an detection section 30B disposed upstream to the coating nozzle 21, detecting the distance to the calibration section 11a and the distance to the surface of the adhesive coated on the work S; and a control apparatus P, calibrating detected values of the detection sections 30A and 30B and calculating the coating thickness of an adhesive R.