发明名称 ECHTANT AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME
摘要 An etchant based on a gross weight comprises: 0.5-20 wt% of persulfate; 0.01-2 wt% of a fluorine compound; 1-10 wt% of an inorganic acid; 0.5-5 wt% of an azole compound; 0.1-5 wt% of an electron-releasing compound; 0.1-5 wt% of a chlorine compound; 0.05-3 wt% of a copper salt; 0.1-10 wt% of an organic acid or an organic acid salt; and water of a remaining portion. If the etchant is used, a precipitate may not be generated in an etching.
申请公布号 KR20150059210(A) 申请公布日期 2015.06.01
申请号 KR20130142280 申请日期 2013.11.21
申请人 SAMSUNG DISPLAY CO., LTD.;DONGWOO FINE-CHEM CO., LTD. 发明人 KIM, SEON IL;KIM, IN BAE;PARK, HONG SICK;CHOUNG, JONG HYUN;KUK, IN SEOL;LEE, SUCK JUN;NAM, GI YONG;PARK, YOUNG CHUL;YU, IN HO;YOON, YOUNG JIN
分类号 C23F1/16;C23F1/18 主分类号 C23F1/16
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