METHOD OF A FORMING STRUCTURE WITH FINE PATTERNS

摘要

The present invention relates to a method for manufacturing structures with fine patterns and, more specifically, a manufacturing method of structures with fine patterns, which has increased productivity by using a polymer mold, comprising the steps of: (a) manufacturing a polymer mold whose surface has patterns; (b) coating the pattern on the polymer mold with fluid materials; (d) arranging a secondary structure supporting substrate on the polymer mold; (e) attaching a cured fluid material to the secondary structure supporting substrate; and (f) separating the polymer mold from the secondary structure supporting substrate and accordingly obtaining a second structure supporting substrate attached with the cured structure of the fluid materials formed by curing the fluid materials, thereby having a high yield, while having low possibility of pattern fault caused by air bubbles, and being good for making microstructure and high density.