FUNCTIONAL ELEMENT, ELECTRONIC DEVICE, AND MOVING OBJECT

摘要

A functional element includes a driving portion, a first mass portion which is vibrated along the first direction, a first connection portion which is connected to the first mass portion and can perform a first movement in which the first connection portion contracts and extends along the first direction, a second connection portion which is connected to the first connection portion, extends in a second direction intersecting the first direction, and can perform a second movement in which the second connection portion rotates with the second direction as the axis, and a second mass portion which is connected to the second connection portion.

主权项

1. A functional element comprising:
a driving portion; a first mass portion which is movable in a first direction; a first connection portion which is connected to the first mass portion and is extendable and contractible in the first direction; a second connection portion which is connected to the first connection portion and is formed in a second direction intersecting the first direction; and a second mass portion which is connected to the second connection portion, wherein the second mass portion can rotate with an axial center of the second connection portion as a rotational axis.