发明名称 SEMICONDUCTOR DEVICE
摘要 A MOSFET (1) which includes a main surface and comprises: SiC layers (11) on which a plurality of contact regions (15) are formed; and a plurality of source electrodes which are formed on and in contact with the contact regions (15). In a plan view of the main surface of the MOSFET (1), a plurality of cells (CL), which include the contact regions (15) and the source electrodes and have a hexagonal outer peripheral shape including a long dimension, are formed adjacent to one another. The contact resistance of the contact regions (15) and the source electrodes of the MOSFET (1) can be further decreased, and therefore the electrical properties of the present invention can be further improved.
申请公布号 WO2015076020(A1) 申请公布日期 2015.05.28
申请号 WO2014JP76031 申请日期 2014.09.30
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 HIRAKATA, NORIYUKI
分类号 H01L29/78;H01L29/12 主分类号 H01L29/78
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