| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of improving the performance by suppressing performance variation for each flow sensor.SOLUTION: According to a flow sensor of an embodiment, a local recess CAV is provided on an upper surface SUR (MR) of a resin MR so as to generate a counterclockwise vortex. This allows the traveling direction of gas (air) that collides against an exposed side surface of a semiconductor chip CHP1 to be changed to a spiral direction instead of an upward direction of the semiconductor chip CHP1 that is 90 degrees different. Thus, the flow sensor of the embodiment allows the flow of the gas (air) over the flow detection unit FDU to be smoothened without causing disturbance thereof, thereby improving the accuracy of flow detection by the flow detection unit FDU. |
