| 摘要 |
PROBLEM TO BE SOLVED: To provide a reagent that improves acid generation from a photoacid generator in chemically amplified resist.SOLUTION: This invention provides 1,1,2-tris (4-methoxyphenyl)-2-triethylsilylethane. The compound releases electrons by light irradiation to promote acid generation from a photoacid generator, and is converted to a phenanthrene derivative by photochemical intramolecular cyclization reaction of a product to further promote acid generation as a sensitizer. |
