发明名称 ELECTRO-OPTIC MODULATOR DEVICE AND METHOD OF MAKING THE SAME
摘要 An electro-optic modulator including a semiconductor region, a first reflecting region over the semiconductor region and an anti-reflecting region on an opposite surface of the semiconductor region from the first reflecting layer. The semiconductor region includes a first doped region and a second doped region.
申请公布号 US2015146275(A1) 申请公布日期 2015.05.28
申请号 US201314089801 申请日期 2013.11.26
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LEE Wan-Yu;KUO Ying-Hao
分类号 H01S5/183;G02F1/015;H01S5/187 主分类号 H01S5/183
代理机构 代理人
主权项 1. An electro-optic modulator device comprising: a semiconductor region, wherein the semiconductor region comprises: a first doped region; anda second doped region; a first reflecting region over the semiconductor region; a first conductive line electrically connected to the first doped region or the second doped region, wherein the first conductive line extends through the first reflecting region; and an anti-reflecting region on an opposite surface of the semiconductor region from the first reflecting layer.
地址 Hsinchu TW