MULTI-TRAY BALLAST VAPOR DRAW SYSTEMS

摘要

A system for supplying vaporized precursor includes an enclosure including an output. A plurality of trays is arranged in a stacked, spaced configuration inside the enclosure. The plurality of trays is configured to hold liquid precursor. A first conduit fluidly connects a carrier gas supply to the enclosure and includes a plurality of openings. A first valve is arranged along the first conduit and is configured to selectively control delivery of the carrier gas from the carrier gas supply through the first conduit to the plurality of openings in the first conduit. The plurality of openings is configured to direct the carrier gas across the liquid precursor in the plurality of trays, respectively. The output of the enclosure provides a mixture of the carrier gas and the vaporized precursor.

主权项

1. A system for supplying vaporized precursor, comprising:
an enclosure including an output; a plurality of trays arranged in a stacked, spaced configuration inside the enclosure, wherein the plurality of trays are configured to hold liquid precursor; a first conduit fluidly connecting a carrier gas supply to the enclosure and including a plurality of openings; and a first valve arranged along the first conduit and configured to selectively control delivery of the carrier gas from the carrier gas supply through the first conduit to the plurality of openings in the first conduit, wherein the plurality of openings are configured to direct the carrier gas across the liquid precursor in the plurality of trays, respectively, and wherein the output of the enclosure provides a mixture of the carrier gas and the vaporized precursor.