主权项 |
1. A method of making a plurality of integrated circuit packages, comprising:
providing a substrate array comprising a plurality of integrated circuit die, each having a first surface that is attached to a first surface of the substrate array; forming a thermally conductive interface layer on a second surface of each integrated circuit die; providing a heat spreader array having opposing first and second surfaces, the heat spreader array comprising a plurality of recess openings formed in the first surface of the heat spreader array to define an outer seal ring and a plurality of pedestals aligned with the plurality of integrated circuit die; partially filling at least the recess openings of the heat spreader array with a liquid mold compound; clamping the substrate array to the heat spreader array by compressing the substrate array into contact with the outer seal ring of the heat spreader array so that the thermally conductive interface layer on each integrated circuit die makes direct contact with a corresponding pedestal from the heat spreader array, thereby partially displacing the liquid mold compound into the plurality of recess openings; and sealing the plurality of integrated circuit die to the heat spreader array by curing the mold compound in the plurality of recess openings, resulting in an array of molded packages, each having a portion of the substrate array exposed on a first side and a portion of the heat spreader array exposed on a second side. |