FIN STRUCTURE

摘要

A fin structure includes a substrate and a fin disposed on a top surface of the substrate. The fin has a height. An epitaxial structure surrounds the fin and the epitaxial structure has a top point which is the farthest point on the epitaxial structure away from the top surface of the substrate. There is a distance between the top point and the top surface of the substrate. A rational number of the distance to the height is not less than 7.

主权项

1. A fin structure, comprising:
a substrate; a fin disposed on a top surface of the substrate, wherein the fin has a height; and an epitaxial structure surrounding the fin, wherein the epitaxial structure has a middle line extending in a vertical direction, the middle line separates the epitaxial structure symmetrically, the middle line starts from a top surface of the epitaxial structure and ends at a top surface of the substrate, and the middle line has a length; wherein a rational number of the length to the height H is not less than 7.