RADIATION IMAGING SENSOR

摘要

The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.

主权项

1. An imaging radiation sensor with
at least one detection element, which is implemented on a substrate as a micromechanical resonator and absorbs radiation to be detected, at least one excitation device, with which the detection element can be set into resonant oscillation and at least one detection device, with which a shift in the resonance frequency of the detection element can be detected, characterized in that the radiation sensor comprises a scanning device with a single-axis or multi-axis tiltable scanning element, via the tilting of which radiation from different directions can be detected with the detection element.