发明名称 |
INCORPORATING ADDITIVES INTO FIXED ABRASIVE WEBS FOR IMPROVED CMP PERFORMANCE |
摘要 |
A structured abrasive article is provided that has a backing having first and second opposed major surfaces and a structured abrasive layer disposed on and secured to the first major surface of the backing. The structured abrasive layer includes a polymeric binder, abrasive particles dispersed in the binder and an additive dispersed in the binder. The additive provides improved chemical mechanical planarization (CMP) polish performance, including high oxide/nitride selectively, high removal rates, lower nitride loss and improved with-in-wafer non-uniformity (WIWNU). |
申请公布号 |
SG11201502225X(A) |
申请公布日期 |
2015.05.28 |
申请号 |
SGX11201502225 |
申请日期 |
2013.09.17 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
QIAN, JULIE, Y.;JOSEPH, WILLIAM, D.;LOPER, STEPHEN, C. |
分类号 |
B24D3/34;C09C1/68;C09K3/14 |
主分类号 |
B24D3/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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