| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric sensor that has a structure from which large signals can be obtained and a simple and compact configuration and can be easily manufactured, and a manufacturing method of the same.SOLUTION: A piezoelectric sensor 10 includes vibration arm parts 11a and 11b and detection arm parts 12a and 12b, and operates as an angular velocity sensor. The vibration arm parts 11a and 11b bend and vibrate in an x-direction being a polarization direction by a voltage Vin, and bend and vibrate also in a z-direction perpendicular to the x-direction by an external force Fc. The detection arm parts 12a and 12b are provided on the vibration arm parts 11a and 11b, respectively, bend and vibrate together with the vibration arm parts 11a and 11b, have a polarization direction along the z-direction, and generate a voltage Vout by the bending and vibration in the z-direction. |
