SYSTEM AND METHOD FOR CONTROLLING A TEMPERATURE OF A REACTION ASSEMBLY

摘要

A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).

主权项

1. A stage assembly that moves a device, the stage assembly comprising:
a stage that retains the device; an assembly that is spaced apart from the stage; a stage mover that moves the stage, the stage mover including a magnet array that is coupled to the stage and a conductor array that is coupled to the assembly, the conductor array including a set of first zone conductor units, and a set of second zone conductor units, wherein current directed to the conductor array generates at least one force that can move the magnet array and the stage relative to the assembly; a temperature adjuster that adjusts the temperature of the set of first zone conductor units, and the temperature of the set of second zone conductor units; and a control system that controls the temperature adjuster.