发明名称 |
Diffraction Grating with Multiple Periodic Widths |
摘要 |
An integrated circuit includes a substrate, a plurality of photo detectors formed in the substrate, and a diffraction grating having multiple sections disposed over the plurality of photo detectors. Each section of the diffraction grating has a respective periodic width for a respective target wavelength. The diffraction grating has at least two different target wavelengths. The diffraction grating is interlaced with filters. The filters in each section of the diffraction grating are configured to pass a respective electromagnetic wave with the respective target wavelength. |
申请公布号 |
US2015145084(A1) |
申请公布日期 |
2015.05.28 |
申请号 |
US201314092592 |
申请日期 |
2013.11.27 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Chang Hsin-Chieh |
分类号 |
G02B26/00;H01L27/146 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
1. An integrated circuit, comprising:
a substrate; a plurality of photo detectors formed in the substrate; and a diffraction grating having multiple sections disposed over the plurality of photo detectors, wherein each section of the diffraction grating has a respective periodic width for a respective target wavelength, the diffraction grating has at least two different target wavelengths, the diffraction grating is interlaced with filters, and the filters in each section of the diffraction grating are configured to pass a respective electromagnetic wave with the respective target wavelength. |
地址 |
Hsin-Chu TW |