发明名称 SEMICONDUCTOR DEVICE AND A METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device including: a first gate pattern disposed in a peripheral region of a substrate; a second gate pattern disposed in a cell region of the substrate; a first insulator formed on sidewalls of the first gate pattern; and a second insulator formed on sidewalls of the second gate pattern, wherein a dielectric constant of the first insulator is different from a dielectric constant of the second insulator, and wherein a height of the second insulator is greater than a height of the second gate pattern.
申请公布号 US2015145056(A1) 申请公布日期 2015.05.28
申请号 US201414565903 申请日期 2014.12.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 Lee Jung-Chan;Lee Seung-Jae;Kang Sang-Bom;Kwak Dae-Young;Kim Myeong-Cheol;Jeon Yong-Ho
分类号 H01L27/088 主分类号 H01L27/088
代理机构 代理人
主权项 1. A semiconductor device, comprising: a first gate pattern disposed in a peripheral region of a substrate; a second gate pattern disposed in a cell region of the substrate; a first insulator formed on sidewalls of the first gate pattern; and a second insulator formed on sidewalls of the second gate pattern, wherein a dielectric constant of the first insulator is different from a dielectric constant of the second insulator, and wherein a height of the second insulator is greater than a height of the second gate pattern.
地址 Suwon-si KR