| 摘要 |
An organic-functional-layer-equipped substrate has a substrate, an organic functional layer provided on the substrate, and a protective film provided on the organic functional layer. The protective film is configured from a silicon oxynitride represented by SiOxNy, wherein x and y satisfy 0.5≤x≤1.0, and -2.2y+2.1≤x≤-2.2y+2.41. Given that the density of the protective film is ρ(g/m3), 2.20(g/m3)≤ρ≤2.60(g/m3). |
