发明名称 |
ACCELERATION DETECTOR, ACCELERATION DETECTING DEVICE, AND ELECTRONIC APPARATUS |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acceleration detector that can prevent moving parts and acceleration detecting elements from being damaged by collision against an inner face of a package or displacement exceeding a limit of strength.SOLUTION: An acceleration detector 1 comprises: a base part 10; a planar moving part 12 connected to the base part 10 via a joint part 11; an acceleration detecting element 13 spanning the base part 10 and the moving part 12; and a supporting part 14 extending from the base part 10 along the moving part 12 in a planar view. In the moving part 12, a mass part 15 that partly overlaps the supporting part 14 in a planar view is arranged on at least one of two main faces 12a and 12b. The moving part 12 can be displaced in a direction of crossing the main face 12a with the joint part 11 as a fulcrum according to acceleration applied to the direction of crossing the main face 12a, and in a region B in which the mass part 15 and the supporting part 14 overlap each other, a gap C is provided between the mass part 15 and the supporting part 14.</p> |
申请公布号 |
JP2015099154(A) |
申请公布日期 |
2015.05.28 |
申请号 |
JP20150001352 |
申请日期 |
2015.01.07 |
申请人 |
SEIKO EPSON CORP |
发明人 |
WATANABE JUN;NAKASENDO KAZUYUKI |
分类号 |
G01P15/08;G01P15/10;H01L41/053;H01L41/113 |
主分类号 |
G01P15/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|