| 摘要 |
<p>PROBLEM TO BE SOLVED: To shorten the time required for assembly and the time required for fault repair.SOLUTION: A scanner device 3 is disposed between an inspection head unit 2 including a plurality of inspection contacts 22 which are to be brought into contact with a plurality of inspection points defined on an inspection object substrate 5, and a measurement instrument 4 and selectively connects arbitrary inspection contacts 22 out of the plurality of inspection contacts 22 to a pair of output terminals 4a and 4b and a pair of input terminals 4c and 4d of the measurement instrument 4 by switching. A plurality of scanner cards 31 including switching circuits are stored in a card rack storage unit 51 in a state where the same numbers of scanner cards are stored respectively in card racks 41 of the same constitution.</p> |
