INSPECTION APPARATUS AND INSPECTION METHOD

摘要

An inspection apparatus and an inspection method capable of performing an inspection more accurately are provided. An inspection apparatus according to the present invention includes a light source 10 that illuminates a sample 30 in which a pattern is formed, a detector 11 that detects light reflected from the sample 30 illuminated by the light source, and a processing device 50 that performs an inspection based on a correlation between a brightness value of a sample image obtained by the detector and a size in a surface shape or a size in a width direction of the pattern of the sample 30. The processing device 50 performs the inspection based on a summation value obtained by adding up brightness values of sample images with weights, the sample images being obtained under a plurality of shooting conditions.

主权项

1. An inspection apparatus comprising:
a light source that illuminates a sample on which a pattern is formed; a detector that detects light reflected from the sample illuminated by the light source to take a sample image in which a position on a surface of the sample is associated with a brightness value for each pixel; and a processing device that performs an inspection based on a correlation between the brightness value of the sample image obtained by the detector and a size in a surface shape or a size in a height direction of the pattern of the sample, wherein the detector obtains a plurality of sample images by shooting the sample under a plurality of shooting conditions, and the processing device calculates a summation value obtained by adding up brightness values of a plurality of sample images with weights for each pixel or each area including a plurality of pixels, and performs an inspection based on the calculated summation value for each pixel or each area.