| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a two-fluid nozzle where: the instability of a liquid volume at an extremely small flow amount in the two-fluid nozzle is improved; the flow rate distribution of a liquid sprayed from a nozzle outlet is uniform; and film in-plane distribution at a coating object surface is made uniform by a spraying liquid.SOLUTION: In a two-fluid nozzle comprising: a plurality of slits to discharge a high pressure gas from a space; a gas nozzle hole to eject the high pressure gas discharged from the plurality of the slits; a liquid introduction port to introduce a liquid; and a liquid nozzle hole to discharge the liquid at the tip part of a liquid-introducing pipe, a plurality of the slits have outlets deviated respectively from the center of the nozzle holes in a same direction and spiral grooves or mountain-shapes are made on the inner wall surface of the liquid-introducing pipe.</p> |
