发明名称 SINGLE CRYSTAL SILICON INGOT AND WAFER, AND APPARATUS AND METHOD FOR GROWING SAID INGOT
摘要 The single crystal silicon ingot and wafer of one embodiment has a transition region formed therein which predominantly has crystal defects of 10 nm to 30 nm in size from among crystal defects included in at least one region of a vacancy predominant non-defective region and an interstitial predominant non-defective region.
申请公布号 US2015147258(A1) 申请公布日期 2015.05.28
申请号 US201314402405 申请日期 2013.04.02
申请人 LG SILTRON INCORPORATED 发明人 Hong Young Ho;Hwang Jung Ha;Cha Il Seon
分类号 C30B29/06;C30B30/04;C30B15/14 主分类号 C30B29/06
代理机构 代理人
主权项 1. A single-crystal silicon ingot and wafer comprising a transition region having predominant crystal defects having a size of 10 nm to 30 nm among crystal defects included in at least one of a vacancy predominant non-defective region and an interstitial predominant non-defective region.
地址 Gumi-si, Gyeongsangbuk-do KR