发明名称 |
SINGLE CRYSTAL SILICON INGOT AND WAFER, AND APPARATUS AND METHOD FOR GROWING SAID INGOT |
摘要 |
The single crystal silicon ingot and wafer of one embodiment has a transition region formed therein which predominantly has crystal defects of 10 nm to 30 nm in size from among crystal defects included in at least one region of a vacancy predominant non-defective region and an interstitial predominant non-defective region. |
申请公布号 |
US2015147258(A1) |
申请公布日期 |
2015.05.28 |
申请号 |
US201314402405 |
申请日期 |
2013.04.02 |
申请人 |
LG SILTRON INCORPORATED |
发明人 |
Hong Young Ho;Hwang Jung Ha;Cha Il Seon |
分类号 |
C30B29/06;C30B30/04;C30B15/14 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
1. A single-crystal silicon ingot and wafer comprising a transition region having predominant crystal defects having a size of 10 nm to 30 nm among crystal defects included in at least one of a vacancy predominant non-defective region and an interstitial predominant non-defective region. |
地址 |
Gumi-si, Gyeongsangbuk-do KR |