| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultrasonic device that can accurately achieve acoustic matching for each frequency of ultrasonic sound to be received.SOLUTION: A substrate 55 has a first plane 58, and a second plane 57 that is separated from a reference plane including the first plane 58 by a specific distance in the normal direction of the reference plane. The first plane has first openings 59a, and the second plane 57 has second openings 59b. A coating layer 56 has a first vibration film 31 that closes the first openings 59a and a second vibration film 36 that closes the second openings 59b. First piezoelectric elements 32 are formed on the first vibration film 31, and second piezoelectric elements 37 are formed on the second vibration film 36. An acoustic matching layer 61 coats the first piezoelectric elements 32 and second piezoelectric elements 37 and has a plane 61a parallel to the first plane 58 and second plane 57.</p> |
