POLYCRYSTALLIZATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a polycrystallization method which can improve production efficiency.SOLUTION: A polycrystallization method for polycrystallizing an amorphous semiconductor film 13 that has a natural oxide film 14 on its surface includes the steps of: cleaning the natural oxide film 14 while leaving the natural oxide film 14 on the surface of the amorphous semiconductor film 13; and polycrystallizing the amorphous semiconductor film 13 in a state where the natural oxide film 14 is left.