Precursors for CVD Silicon Carbo-Nitride Films

摘要

Classes of liquid aminosilanes have been found which allow for the production of silicon carbo-nitride films of the general formula SixCyNz. These aminosilanes, in contrast, to some of the precursors employed heretofore, are liquid at room temperature and pressure allowing for convenient handling. In addition, the invention relates to a process for producing such films.;The classes of compounds are generally represented by the formulas:;;and mixtures thereof, wherein R and R1 in the formulas represent aliphatic groups typically having from 2 to about 10 carbon atoms, e.g., alkyl, cycloalkyl with R and R1 in formula A also being combinable into a cyclic group, and R2 representing a single bond, (CH2)n, a ring, or SiH2.

主权项

1. A method of making an aminosilane represented by the following formulas A or B:wherein R and R1 are each selected from the group consisting of C2 to C10 alkyl groups, branched, or cyclic, saturated or unsaturated, aromatic, heterocyclic, with or without substituents and alkylamino groups; and R and R1 in formula A can also be formed into a cyclic group, the method comprising the steps of:
providing a reaction mixture comprising an amine selected from the group consisting of a secondary amine or a primary amine; and adding to the reaction mixture an arylsilane and a sulfonic acid wherein the arylsilane and sulfonic acid react to form an intermediate and wherein the amine reacts with the intermediate to provide the aminosilane having the formula A or B.