| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a processing device capable of subjecting a desired position to uniform processing from a lower surface of a processing object held on a chuck table.SOLUTION: The processing device includes: height position detection means 56 which detects a height position in a Z axis direction of a holding surface of a chuck table 36; and control means including a memory having a first storage area in which gaps in an X axis direction and a Y axis direction between the height position detection means and a processing part of processing means are stored and a second storage area in which Z coordinate values for respective XY coordinate values on the holding surface of the chuck table are stored. The control means adds the gaps in the X axis direction and the Y axis direction between the height position detection means and the processing part, which are stored in the first storage area of the memory, to the XY coordinate values stored in the second storage area of the memory, on the basis of detection signals from X axis-direction position detection means 374 and Y axis-direction position detection means 384 to obtain a Z coordinate value for XY coordinate values corresponding to the processing part and controls Z axis movement means 55 on the basis of the obtained Z coordinate value for the XY coordinate values.</p> |
