发明名称 STANDARD GAUGE, THREE-DIMENSIONAL MEASURING DEVICE, AND THREE-DIMENSIONAL MEASURING DEVICE CALIBRATION METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a standard gauge, a three-dimensional measuring device, and a three-dimensional measuring device calibration method capable of carrying out high accuracy calibration.SOLUTION: A standard gauge 5 is a standard gauge for carrying out calibration to a three-dimensional measuring device for measuring a three-dimensional shape by irradiating a target with laser light at a single wavelength and measuring the laser light reflected by the target. The standard gauge 5 includes a plurality of protrusions 55 each including a top surface parallel to a bottom surface and a side surface continuous to an outer periphery of the top surface and forming 90 degrees or more with respect to the top surface, the top surface and the side surface each having a reflectivity equal to or higher than a first threshold for the laser light, the top surface having a reflectivity equal to or higher than a second threshold for light at wavelengths other than the wavelength of the laser light, and the side surface having a reflectivity lower than the second threshold for the light at the wavelengths other than the wavelength of the laser light, at least two protrusions 55 differing in a height of the top surface.</p>
申请公布号 JP2015099049(A) 申请公布日期 2015.05.28
申请号 JP20130238110 申请日期 2013.11.18
申请人 SEIKO EPSON CORP 发明人 WAKABAYASHI JUN
分类号 G01B11/25 主分类号 G01B11/25
代理机构 代理人
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