| 发明名称 |
OPERATING METHOD OF FIRST DERIVATIVE MEASURING APPARATUS |
| 摘要 |
Provided is an operating method of a measuring apparatus measuring a wavefront of a target. The operating method includes measuring a measurement wavefront on the basis of the wavefront of the target, measuring reference slope information and first to third slope information respectively corresponding to a reference direction and first to third directions on the basis of the measurement wavefront, obtaining first to third rotation angles on the basis of the measured reference slope information and first to third slope information, and outputting a wavefront of which an error is corrected, which is generated by rotation errors on the basis of the obtained first to third rotation angles, wherein the first to third rotation angles are differences in angle between the reference direction and the first to third directions. |
| 申请公布号 |
US2015146213(A1) |
申请公布日期 |
2015.05.28 |
| 申请号 |
US201414318003 |
申请日期 |
2014.06.27 |
| 申请人 |
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE |
发明人 |
RHEE Hyug-Gyo;GHIM Young Sik;YANG Ho Soon;LEE Yun Woo |
| 分类号 |
G01J9/02 |
主分类号 |
G01J9/02 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. An operating method of a measuring apparatus measuring a wavefront of a target, the operating method comprising:
measuring a measurement wavefront on the basis of the wavefront of the target; measuring reference slope information and first to third slope information respectively corresponding to a reference direction and first to third directions on the basis of the measurement wavefront; obtaining first to third rotation angles on the basis of the measured reference slope information and first to third slope information; and outputting a wavefront of which an error is corrected, which is generated by rotation errors on the basis of the obtained first to third rotation angles, wherein the first to third rotation angles are differences in angle between the reference direction and the first to third directions. |
| 地址 |
Daejeon KR |
