| 主权项 |
1. A bio-chip package comprising:
a substrate having a first side and a second side opposite the first side; a first layer over the substrate covering a first-substrate portion, the first layer comprising an image sensor; a second layer over the first layer and at least some of the first-substrate portion, the second layer comprising
a waveguide system; anda grating coupler; a third layer comprising
a first-third layer portion over a first-second layer portion; anda second-third layer portion over a second-second layer portion, at least some of the first-substrate portion, and a second-substrate portion excluded from the first-substrate portion, the first-third layer portion being separated from the second-third layer portion by a spacing, such that the third layer is arranged to accommodate a fluid between the first-third layer portion and the second-third layer portion, and to allow the fluid to pass from a first side of the third layer over the first side of the substrate to a second side of the third layer over the second side of the substrate; and a fourth layer over the third layer and the spacing between the first-third layer portion and the second-third layer portion, the fourth layer, the third layer, and the second layer together forming a cavity therebetween within which the fluid is accommodated, wherein the third layer comprises a material having a predetermined transparency with respect to a wavelength of a received source light, the waveguide system being configured to direct the received source light to the grating coupler, and the image sensor being configured to determine a change in the wavelength of the source light caused by a coupling between the source light and the fluid. |
