FERROELECTRIC CERAMIC AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a ferroelectric ceramic which enables the enhancement in piezoelectric property by increasing the quantity of crystalline oriented a c-axial direction in a PZT film.SOLUTION: A ferroelectric ceramic according to an embodiment of the present invention comprises: a Si substrate 11; a multilayer film 12 formed on the Si substrate 11; a Pt film 13 formed on the multilayer film; a SrTiOfilm 14 formed on the Pt film; and a PZT film 15 formed on the SrTiOfilm. The multilayer film includes: a film formed by repeating the steps of forming a first ZrOfilm and a YOfilm in turn, provided that the number of the repetition is N; and a second ZrOfilm formed on the film formed by the N times repetition. The number N is an integer of one or larger. It is preferred that the ratio Y/(Zr+Y) of the multilayer film is 30% or less in percentage.