PROCESSING ROOM HAVING COMPACT ROTATING ARM, AND COMPACT MANUFACTURING DEVICE

摘要

[Problem] To provide a compact and low-cost manufacturing device that uses a processing substrate with a small diameter. [Solution] A conveyor robot having a compact rotating arm in the uppermost part, and a plurality of substrate processing devices surrounding the conveyor robot and located on a rotating arc of the compact rotating arm are installed in one box-shaped housing. A processing substrate is transferred to the compact rotating arm, the compact rotating arm rotates about a rotation center, and thereby the processing substrate is transferred between the substrate processing devices. Consequently, reductions in size and price of a manufacturing device can be achieved.