SUPPLY EQUIPMENT, PROCESSING DEVICE, AND SUPPLY METHOD

摘要

[Problem] To improve precision of supply in supply equipment and a supply method that supplies a particle group and fluid to a processing space wherein processing is implemented by processing equipment. [Solution] Supply equipment (11) is provided with a syringe (21), a first flow path (30), a fluid reservoir (50) for introduction, and a syringe pump (20). The fluid reservoir (50) for introduction has a cylindrical part (51a) connected to the first flow path (30) and a funnel shaped part (51b) the tip of which narrows from a region connected to the cylindrical part (51a). A boundary between the cylindrical part (51a) and the funnel shaped part (51b) has a cross-sectional surface area larger than the cross-sectional surface area of the first flow path (30), and the cylindrical part (51a) and the funnel shaped part (51b) are formed so as to have a volume smaller than the syringe (21). The cylindrical part is disposed above and the funnel shaped part below to suck in the particle group and fluid imparted from an external container (91) and temporarily store the same.