发明名称 ROTATION MECHANISM, MACHINE TOOL, AND SEMICONDUCTOR MANUFACTURING DEVICE
摘要 A rotation mechanism is provided with: a housing; a shaft; a bearing for rotatably supporting the shaft; a first rotation member that is disposed at a first end of the shaft and has an overhang projecting radially outward beyond a first hole and to a side portion of the housing, said overhang facing the side portion of the housing across a first clearance having a predetermined size; a second rotation member that is disposed at a second end of the shaft, projects radially outward beyond a second hole, and faces the housing at the second end side across a second clearance having a predetermined size; a first aperture that opens into the housing radially outward the first hole, faces the first rotation member, and extends along the circumferential direction of the first hole to supply gas into the first clearance; and a second aperture that opens into the housing radially outward the second hole of the housing, faces the second rotation member, and extends along the circumferential direction of the second hole to supply gas into the second clearance.
申请公布号 WO2015076313(A1) 申请公布日期 2015.05.28
申请号 WO2014JP80689 申请日期 2014.11.19
申请人 NSK LTD. 发明人 NAKAMURA, TSUYOSHI
分类号 F16J15/40;B23B19/02;F16C19/06;F16C19/54;F16C33/76;F16C35/12 主分类号 F16J15/40
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