CAPACITIVE PRESSURE SENSOR

摘要

In order to provide a capacitive pressure sensor that makes it possible to prevent misalignment between a diaphragm and an electrode surface in a direction parallel to said diaphragm and allows precise pressure measurement, this capacitive pressure sensor is provided with the following: a diaphragm that is deformed by pressure; an electrode part that has an electrode surface that faces the diaphragm such that a gap is formed therebetween; a body inside which at least part of the electrode part is accommodated, the diaphragm being joined to one end of said body; an insulating positioning part that is provided inside the body and positions at least part of the electrode part inside the body; and a pressure-applying mechanism that supports the insulating positioning part or the electrode part by applying pressure thereto in a direction parallel to the diaphragm.